Examining microdevices. Sheet of microelectromech- anical systems (MEMS) being examined with an interference microscope (surface profiler). MEMS are electrical and mechanical devices with micrometre-sized parts. They include tiny robots (nanorobots),as well as miniature laboratories (labs on a chip) which can be used in sensors or diagnostic devices. The surface features of this MEMS are being found to a vertical resolution of one tenth of a nanometre using white light interferometry,the pattern caused by the interaction of two waves of white light. Photographed in the Micromechanics Lab of Newcastle University,England | |
Lizenzart: | Lizenzpflichtig |
Credit: | Science Photo Library / Cuthbert, Colin |
Bildgröße: | 3752 px × 3783 px |
Modell-Rechte: | nicht erforderlich |
Eigentums-Rechte: | nicht erforderlich |
Restrictions: | - |