Nanotechnology Centre,IBM research. Researchers working in the clean rooms at the Nanotechnology Centre at IBM Research-Zurich,Switzerland. These facilities include class 100 (ISO 5) to class 10,000 (ISO 7) clean rooms. Processes carried out here include lithography,wet processing,wet chemical etching,thin-film deposition,dry etching,thermal processing,and vapour phase deposition. Other processes include plating,lapping/polishing,dicing and bonding,and polymer waveguide processing. Materials include semiconductors (such as silicon),metals,insulators,polymers,organics and oxides. Photographed in 2011 |